Grating structures are fabricated inside glass based on femtosecond laser parallel processing technology

Yaofei Ma; Shufeng Sun; Jin Wang; Fengyun Zhang; Xuecheng Gao; Tao Wei; Zhihao Qu; Pingping Wang

doi:10.63313/AERpc.9051

Authors

Yaofei Ma Discipline Innovation and Wisdom Introduction Base of High-end Laser Intelligent Manufacturing Technology and Equipment, school of Mechanical and Automotive Engineering, Qingdao University of Technology, Qingdao 266520, China Author
Shufeng Sun Discipline Innovation and Wisdom Introduction Base of High-end Laser Intelligent Manufacturing Technology and Equipment, school of Mechanical and Automotive Engineering, Qingdao University of Technology, Qingdao 266520, China Author
Jin Wang Discipline Innovation and Wisdom Introduction Base of High-end Laser Intelligent Manufacturing Technology and Equipment, school of Mechanical and Automotive Engineering, Qingdao University of Technology, Qingdao 266520, China Author
Fengyun Zhang Discipline Innovation and Wisdom Introduction Base of High-end Laser Intelligent Manufacturing Technology and Equipment, school of Mechanical and Automotive Engineering, Qingdao University of Technology, Qingdao 266520, China Author
Xuecheng Gao Discipline Innovation and Wisdom Introduction Base of High-end Laser Intelligent Manufacturing Technology and Equipment, school of Mechanical and Automotive Engineering, Qingdao University of Technology, Qingdao 266520, China Author
Tao Wei Discipline Innovation and Wisdom Introduction Base of High-end Laser Intelligent Manufacturing Technology and Equipment, school of Mechanical and Automotive Engineering, Qingdao University of Technology, Qingdao 266520, China Author
Zhihao Qu Discipline Innovation and Wisdom Introduction Base of High-end Laser Intelligent Manufacturing Technology and Equipment, school of Mechanical and Automotive Engineering, Qingdao University of Technology, Qingdao 266520, China Author
Pingping Wang Discipline Innovation and Wisdom Introduction Base of High-end Laser Intelligent Manufacturing Technology and Equipment, school of Mechanical and Automotive Engineering, Qingdao University of Technology, Qingdao 266520, China Author

DOI:

https://doi.org/10.63313/AERpc.9051

Keywords:

Femtosecond laser, Spatial light modulator, holography, Glass gratings

Abstract

Femtosecond laser single-focus scanning has the problem of low efficiency when manufacturing large-area structures. This paper proposes a multi-focus parallel processing method based on the weighted Gerchberg-Saxton (GS) algorithm. A multi-focus hologram was designed and loaded onto a spatial light modulator to achieve uniform energy distribution. The effects of repetition frequency, processing times and scanning speed on the morphology of microchannels were systematically studied, and the uniformity was all above 90%. Using the optimized process parameters, a grating structure with a cross-sectional width of approximately 29.315 μm was fabricated inside the glass by the three-focal parallel process. Compared with single-focus scanning, this method triples the efficiency while maintaining high quality, providing a promising path for the manufacturing of scalable photonic devices.

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